1 · SIMS principles
Ion sources and primary column, mass spectrometer and secondary column, visualization and detection system.
The manual follows the instrument workflow: starting the machine, preparing and loading samples, tuning the sources and aligning the columns.
1 · SIMS principles
Ion sources and primary column, mass spectrometer and secondary column, visualization and detection system.
2 · Starting the instrument
Vacuum cabinet, HV and real-time cabinet, security checks, vacuum safety, water/gas flow meters, nitrogen and compressed air lines.
3 · Instruments bake out process
Preparatory steps, bake-out launching and operations at the end of baking.
4 · Sample preparation
Preparing the sample holder: back-plates, spring, window centring and screws.
5 · Introduction of sample holder
Automatic Multi-Storage Chamber, Navigator software, and the load/unload procedures.
6 · Tuning software
Tuning panels, preset boxes (standard, apertures and mass, detector) and beam position boxes.
7 · Starting Cesium source
Principle of the Cs source and start/stop from the Tuning software, including the Calib Cs Position panel.
8 · Alignment of Secondary Column
Projection, mass spectrometer, immersion lens and transfer lenses, energy slit and detectors.
9 · Alignment of Primary Column (Cs)
Varying the primary current, overall procedure and detailed alignment steps with the Cs source.
10 · Starting Duoplasmatron source
Principle of the Duoplasmatron source and its start/stop from the Tuning software.
11 · Alignment of Secondary Column (Repeat)
Repeating the secondary column alignment after the primary column has been aligned.
12 · Alignment of Primary Column (Duo)
Varying the primary current and the full alignment procedure with the oxygen (Duoplasmatron) source.
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