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CAMECA IMS 7f-Auto operation manual

Operating manual for the CAMECA IMS 7f-Auto secondary ion mass spectrometer — from switching the instrument on to the alignment of the primary and secondary columns.

The manual follows the instrument workflow: starting the machine, preparing and loading samples, tuning the sources and aligning the columns.

1 · SIMS principles

Ion sources and primary column, mass spectrometer and secondary column, visualization and detection system.

2 · Starting the instrument

Vacuum cabinet, HV and real-time cabinet, security checks, vacuum safety, water/gas flow meters, nitrogen and compressed air lines.

3 · Instruments bake out process

Preparatory steps, bake-out launching and operations at the end of baking.

4 · Sample preparation

Preparing the sample holder: back-plates, spring, window centring and screws.

5 · Introduction of sample holder

Automatic Multi-Storage Chamber, Navigator software, and the load/unload procedures.

6 · Tuning software

Tuning panels, preset boxes (standard, apertures and mass, detector) and beam position boxes.

7 · Starting Cesium source

Principle of the Cs source and start/stop from the Tuning software, including the Calib Cs Position panel.

8 · Alignment of Secondary Column

Projection, mass spectrometer, immersion lens and transfer lenses, energy slit and detectors.

9 · Alignment of Primary Column (Cs)

Varying the primary current, overall procedure and detailed alignment steps with the Cs source.

10 · Starting Duoplasmatron source

Principle of the Duoplasmatron source and its start/stop from the Tuning software.

11 · Alignment of Secondary Column (Repeat)

Repeating the secondary column alignment after the primary column has been aligned.

12 · Alignment of Primary Column (Duo)

Varying the primary current and the full alignment procedure with the oxygen (Duoplasmatron) source.

Each chapter is available in English and 简体中文; switch language from the selector at the top of the page. Figures are taken from the original manual at full resolution and stay inline where they are printed inline.