1 SIMS Principles

Welcome to the foundational training section of the CAMECA IMS 7f-Auto operation manual.

This chapter introduces the fundamental instrumentation and ion-optical principles of Secondary Ion Mass Spectrometry (SIMS) implemented on the IMS 7f-Auto:

• 1.1 Ion sources and primary column: In-line ion optical primary column, Duoplasmatron and Cesium microbeam sources, Wien mass filters, and primary column last stage.
• 1.2 Mass spectrometer and Secondary column: Secondary ion optics, immersion lens, transfer optics, and double-focusing mass spectrometer principles.
• 1.3 The Visualization / Detection system: MicroChannel Plate (MCP) direct imaging, fluorescent screen, Faraday Cup (FC), and Electron Multiplier (EM) counting systems.