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IMS 7f-Auto Operation Manual
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1 · SIMS Principles
1 SIMS Principles
1.1 Ion sources and primary column
1.2 Mass spectrometer and Secondary column
1.3 The Visualization / Detection system
2 · Starting the instrument
2 Starting the instrument
2.1 Vacuum cabinet starting
2.2 High voltage and real time cabinet starting
2.3 Security checking
2.4 Vacuum safety
2.5 Water and galden flow meters safety
2.6 Nitrogen and Compressed air lines
3 · Instruments bake out process
3 Instruments bake out process
3.1 Preparatory steps
3.2 Bake out launching
3.3 At the end of the baking
4 · Sample preparation
4 Sample preparation:
5 · Introduction of sample holder
5 Introduction of sample holder to the analysis chamber:
5.1 Automatic Multi-Storage Chamber
5.2 Control Multi-Storage Chamber: Navigator software
5.3 Introduction of sample holder in the storage chamber
5.4 Load/unload procedure of sample holder in the analysis chamber
6 · Tuning software
6 Tuning software
6.1 The Tuning Panels Description
6.2 The preset boxes: The standard preset box
6.3 The preset boxes: Apertures and Mass
6.4 The preset boxes: The detector box.
6.5 The "Beam Position" and "Area Position" boxes
7 · Starting Cesium source
7 Starting Cesium source
7.1 Principle of the Cesium source
7.2 Starting Cesium source from tuning software
8 · Alignment of Secondary Column
8 Alignment procedure of the Secondary Column
8.1 Alignment procedure for Projection
8.2 Alignment procedure for Mass spectrometer
8.3 Alignment procedure for Immersion lens and Transfer
8.4 Alignment procedure for Energy Slit and Detectors
9 · Alignment of Primary Column (Cs)
9 Alignment procedure of the Primary Column with Cesium source
9.1 Varying the primary current
9.2 Overall alignment procedure
9.3 Alignment Procedure:
10 · Starting Duoplasmatron source
10 Starting Duoplasmatron source
10.1 Principle of the Duoplasmatron source
10.2 Starting Duoplasmatron source from tuning soft
11 · Alignment of Secondary Column (Repeat)
11 Alignment procedure of the Secondary Column (Repeat)
12 · Alignment of Primary Column (Duo)
12 Alignment procedure of the Primary Column with Duoplasmatron source
12.1 Varying the primary current
12.2 Overall alignment procedure
12.3 Alignment Procedure with Oxygen source:
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5 Introduction of sample holder to the analysis chamber:
5.1 Automatic Multi-Storage Chamber
5.2 Control Multi-Storage Chamber: Navigator software
5.3 Introduction of sample holder in the storage chamber
5.4 Load/unload procedure of sample holder in the analysis chamber