2.4 Vacuum safety
Different safeties are related to the vacuum. These safeties status is shown in the vacuum synoptic as below in the red box. When the box is red, safety is on. In contrary, when the box is green, safety is off.
These safeties status depend on different situations shown below:
- No high voltage in a part of the instrument when:
- Valve related to this part is closed:
■ “Source” safety is on when valve EP3 is closed.
- “Second” safety is on when manual valve VM1 is closed.
- “Sample” safety is on when manual valve VM1 is closed and valve EP4 is open.
- The part is vented, or the vacuum value is bad.
- “CS” safety is on when CS part is vented, or the vacuum value is bad.
■ “Duo” safety is on when Duo part is vented, or the vacuum value is bad.
- Venting or pumping a part is not allowed when the valve related to the part is open:
- Duo = EP1 and EP7
○ CS = EP2
Source chamber = EP1, EP2 and EP3
○ Analysis chamber = EP3, EP4 and VM1
○ Storage = EP4 and EP5
- Spectro = VM1
- Loadlock = EP5