12 Alignment procedure of the Primary Column with Duoplasmatron source

It is advised to create the lower impact energy ISF files by performing an extrapolation from the high impact energy reference ISF file (using the Source HV valid and Sample HV valid functions of the Tuning program). The same tuning procedure, as described below, can then be applied for a more precise alignment. Note that the lenses and deflector values are expected to be proportional to the Source HV (except for L4, Beam Pos, and stigmators that also depend on the Sample HV, and the Wien DY parameter which varies as the square root of Source HV).

• 12.1 Varying the primary current: Lens configurations and beam density for Standard and Very small beam settings.
• 12.2 Overall alignment procedure: Starting conditions and pre-alignment of secondary optics.
• 12.3 Alignment Procedure with Oxygen source: Step-by-step alignment with Duoplasmatron (O₂⁺).